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Cleanroom floors demand the same kind of special attention required for other details of cleanroom design and construction. Among the criteria for cleanroom floors are:

Although few cleanroom floors meet all the requirements, every cleanroom floor must exhibit at least some of these characteristics to qualify under industry and government standards. Over the years, various construction materials and coverings have been employed to meet cleanroom requirements. These include such materials as concrete, terrazzo, vinyl sheeting, tile, thin-film coatings (paint), and most recently, engineered polymer toppings.

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