FAB Cleanroom
In the microelectronics industry a semiconductor fabrication plant (commonly called a fab; sometimes foundry) is a factory where devices such as integrated circuits are manufactured.
A business that operates a semiconductor fab for the purpose of fabricating the designs of other companies, such as fabless semiconductor companies, is known as a foundry. If a foundry does not also produce its own designs, it is known as a pure-play semiconductor foundry.
Fabs require many expensive devices to function. Estimates put the cost of building a new fab over one billion U.S. dollars with values as high as $3–4 billion not being uncommon. TSMC invested $9.3 billion in its Fab15 300 mm wafer manufacturing facility in Taiwan.[1]
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HVAC |
Make-UP Air, Recirculation Air, Temp & RH Control, Exhaust, Diff Pressure, Chilled Water, Steam System, Air Velocity, Air Change Rate |
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Archi |
Raised Floor, EQ Layout, Vibration, Partition, Static Electricity, Magnetic Interference |
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Land |
Soil Drilling, Soil Analysis, Vibration Measure |
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Public Utility |
City Water, Power System, Road Transportation, Gas Line |
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Environment |
Clean Room Management, House Keeping, Air Shower, Noise Control |
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Safety |
Fire Alarm, Gas Detection, Safety Corridor, Fire Wall, Emergency Shower, Paging, Communication, Breathing Air |
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Power |
High Tension Power, EQ Power, Lighting Power, Emergency Power, UPS |
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Facility |
Supply, Chemical Dispense, Gas Supply, Process Cooling Water, Drain, Waste Water Treat, Waste Reclaim, Plant Vacuum |
Cleanroom Features
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Environment Conditions |
Cleanliness, Temperature, Humidity, Pressure, Vibration, Noise, Easy to Clean and No Smell |
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Flexible Space |
Static Elimination, Monitoring System, Standardized Cleaning, Rationalization Moving Lines |
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Prevention for Public Hazard & Disaster |
Exhaust Gas Treatments Equipment, Wastewater Treatments Equipment, Poison Gas Dilution System, Noise Prevention and Countermeasures, Easy to Maintain, Evacuation Path Signal Board, Fire System, Emergency Shower, Eyewash System, Toxic Gas Detection System, Shockproof of Countermeasures |
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Continuous Operation |
Back-up System, Power Failure Protection Equipment, Central Monitoring System, Energy Saving Plan |
